Infiniti Solutions presents the iMFC Mass Flow Control System. The i MFC50/51 is a pressure-based mass flow control system that will maintain a constant pressure to an orifice with an internal pressure regulator (while reducing cost through elimination of external pressure regulator).

Infiniti Solutionspresents the iMFC Mass Flow Control System. The iMFC is a pressure-based mass flow control system that will maintain a constant pressure to an orifice with an internal pressure regulator (while reducing cost through elimination of external pressure regulator). The device also incorporates a pressure rate-of decay system with in the controller, (flow varification) which eliminates sensor drift providing for reliable, accurate performance for an extended lifetime of the product.

Infiniti Solutions presents the eMFC Mass Flow Control System. The eMFC50/51 is a low-cost, pressure-based mass flow control system that will maintain a constant pressure to an orifice with an internal pressure regulator (while reducing cost through elimination of external pressure regulators).

Historically, customers are forced to fit their process gas needs into available bin sizes (from 9 to 13) with our competitors. While the Infiniti Solutions iMFC offers a wider range than any of our competitors’ equivalent bins, the Infiniti Solutions design has an added inherent advantage to further reduce your spares inventory using its on-tool calibration features (for all models)!

Now, as a gas panel integrator, or system designer, you can take any of the above 4 configurations from your inventory, get a sizing seal/flow restrictor for the gas you want to flow on that channel and, using the Infiniti Solutions in-situ calibration metrology (i100/i200) or the on-tool metrology match calibration feature (i050), you can program the MFC to match and flow within 1% accuracy from 5 to 100% of its range at the touch of a button!

For example, if your process had all gases in the N2 equivalent full scale between 301 sccm to 10,000 sccm, then you could build your entire gas delivery system with ONE SINGLE Infiniti Solutions hardware configuration, M, and each of your process gas needs will be optimized such that you can get 5-100% of process gas range with 1% accuracy IN ACTUAL GAS!

Now, as a gas panel integrator, or system designer, you can take any of the above 4 configurations from your inventory, get a sizing seal/flow restrictor for the gas you want to flow on that channel and, using the in-situ calibration metrology (i100/i200) or the on-tool metrology match calibration feature (i050), you can program the MFC to match and flow within 1% accuracy from 5 to 100% of its range at the touch of a button!

DeviceNet / Analog / RS485 combined

EtherCAT / Analog / RS485 combined (add DNET adapter to meet all your fab tool electrical connection requirements)